Swagelok® Ultrahigh-Purity Diaphragm Valves for Atomic Layer Processing (ALD3 and ALD6 Series)
Swagelok ALD3 and ALD6 series diaphragm valves are used in semiconductor manufacturing tools to achieve the controlled dosing necessary for atomic layer deposition (ALD) processing. They offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62.
Request ALD Valve InformationUltrahigh-purity Swagelok® ALD3 and Swagelok® ALD6 diaphragm valves are designed to provide semiconductor manufacturers with dependable, high-speed dosing of precursor gases used to build up microchips layer by layer in deposition chambers. These high-performance ultrahigh-purity valves feature an ultrahigh cycle life, full immersibility at elevated temperatures, and suitability for ultrahigh-purity applications.
The diaphragms used in ALD3 and ALD6 valves are composed of a cobalt-based superalloy material that provides strength and corrosion resistance. Their valve bodies are 316L VIM-VAR stainless steel, making them suitable for ultrahigh-purity applications. The valve seats are made of fluorinated high-purity PFA to enable a broad range of chemical compatibility and resistance to swelling and contamination. These valves can be set up for normally closed and normally open pneumatic actuation, and they are available in a variety of configurations to suit different installation requirements.
See How ALD Valves Improve Semiconductor Manufacturing
ALD3 and ALD6 Valve Specifications
| Working Pressure | Vacuum to 145 psig (10.0 bar) |
| Burst Pressure | >3200 psig (220 bar) |
| Actuation Pressure | 50 to 90 psig (3.5 to 6.2 bar) |
| Temperature | 32° to 392°F (0° to 200°C) |
| Flow Coefficient (Cv) | 0.27 or 0.62 |
| Body Materials | 316L VIM-VAR stainless steel |
| Diaphragm Material | Cobalt-based superalloy |
| End Connections | Type (Size): Female VCR® face seal fitting (1/4 in. to 1/2 in.), male VCR face seal fitting (1/4 in. to 1/2 in.), modular surface mount high-flow C-seal (1.125 in. to 1.5 in.) |
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ALD3 and ALD6 Series Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Характеристики: Сверхвысокий циклический срок службы с высокой скоростью срабатывания; Cv в диапазоне от 0,27 до 0,62; возможность работы при температуре до 392 °F (200 °C) с термостойкими приводами; вариант исполнения с электронным датчиком положения привода; подходят для применения в сверхчистых системах с корпусом из нержавеющей стали 316L VIM-VAR; торцевые соединения VCR®, под приварку встык и модульные торцевые соединения для монтажа на поверхность.
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