Manómetros de Ultra Alta Pureza y Aire Seco Limpio (Series PGU y PGC) Swagelok®
Los manómetros Swagelok® de ultra alta pureza y aire seco limpio utilizan un tubo Bourdon para monitorizar de forma fiable la presión positiva y el vacío del sistema.
Solicitud de Información sobre ManómetrosSwagelok® PGU series ultrahigh-purity pressure gauges and Swagelok® PGC series clean dry air pressure gauges are designed for use in a wide range of applications, from bulk gas distribution to process tool applications. Their accuracy is in accordance with ASME B40.1, EN837-1, and JIS B7505.
PGU series gauges are ultrahigh-purity (UHP) “clean” for semiconductor gas applications in accordance with SEMI/SEMATECH, are cleaned and packaged in a class 100/10 cleanroom, and have 316L VAR end connections. PGC series gauges are assembled, cleaned, and packaged in a class 100 cleanroom and have 1/4 in. NPT end connections. Both series are purged with nitrogen and include protective cap over threaded connection. Every ultrahigh-purity and clean dry air gauge is 100% factory calibrated and helium leak tested to a maximum rate of 1× 10-9 std cm3/s.
Specifications
| Dial Ranges | PGU series: Vacuum to 3000 psi; 200 bar; 21 MPa PGC series: Vacuum to 6000 psi; 400 bar; 40 MPa |
| Dial Sizes | 28, 40, and 50 mm (1, 1 1/2, and 2 in.) |
| Accuracy |
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| Temperature Range | Ambient: –40 to 140°F (–40 to 60°C) Media: –40 to 212°F (–40 to 100°C) |
| End Connections | PGU series: 1/4 in. female VCR® fitting, 1/4 in. rotatable male VCR fitting, 1/4 in. integral male VCR fitting, 1 1/2 in. flow-through surface-mount PGC series: 1/4 in. male NPT fitting |
Pressure Gauges Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Features: 50 mm (1 1/2 and 2 in.) dial sizes; Accuracy in accordance with ASME B40.100; 316L VAR end connections (PGU series); Center-back and lower mount configurations
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