Swagelok® Atomic Layer Deposition (ALD) Valves
Swagelok ultrahigh-purity atomic layer deposition (ALD) valves offer the ultrahigh cycle life, high-speed actuation, flow rates, thermal immersibility, and extreme cleanliness needed to enable precise dosing and maximize chip yield in advanced semiconductor manufacturing applications.
Request ALD Valve InformationSince introducing the world to ALD valves, we have worked closely with semiconductor tool OEMs and fabricators to advance ALD dose control—helping customers keep pace with rapid innovation, accelerate development timelines, and improve chip yield in increasingly complex processes. Across our full portfolio, Swagelok® ALD valves deliver the precision, consistency, cleanliness, and ultrahigh cycle life required to maintain stable performance in demanding applications.
Designed for tight flow control, fast actuation, and high-temperature stability, our valves reduce dose variability—supporting higher wafer yield and faster development cycles to help customers bring next-generation technologies to market faster.
Our ALD ultrahigh-purity valves feature:
- Ultrahigh cycle life with high-speed actuation
- Flow coefficients ranging from 0.27 Cv to 1.7 Cv
- Temperature capability up to 482°F (250°C) for specified models
- Field flow adjustability options available
- Electronic or optical actuator position-sensing option
- Suitable for ultrahigh-purity applications with 316L VIM-VAR stainless steel and alloy 22 body options
- Modular surface-mount, tube butt weld, and VCR® end connections available
- Available in single body as well as additive manufactured (AM) manifold offerings
Catégories de vannes pour dépôt par couche atomique (ALD)
Vannes très haute pureté pour applications haut débit, série ALD20
Faites progresser la technologie du dépôt par couche atomique avec des débits 2 à 3 fois plus élevés qu’avec d’autres vannes ALD grâce à la vanne très haute pureté ALD20.
Vannes à membrane très haute pureté, séries ALD3 et ALD6
Conçues pour les applications de dépôt par couche atomique, les vannes à membrane ALD3 et ALD6 se caractérisent par une durée de vie très longue, un actionnement ultrarapide et une grande robustesse.
Vannes à membrane très haute pureté, série ALD7A
La vanne à membrane très haute pureté ALD7 Swagelok® offre la précision et la régularité nécessaires pour maximiser la production de puces dans le secteur des semi-conducteurs.
Vannes à membrane très haute pureté, série ALD7C
Swagelok ALD7C ultrahigh-purity diaphragm valves deliver performance, speed, and reliability in the most advanced ALD applications.
Atomic Layer Deposition (ALD) Valve Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
ALD3, ALD6, ALD7A, and ALD7C Diaphragm Valves and ALD20 Bellows: Ultrahigh cycle life, high-speed actuation; Up to 482°F (250°C) w thermal actuators; Electronic actuator position-sensing; ultrahigh-purity applications; High flow capacity, PFA seat, Normally closed pneumatic actuation, Alloy 22 available
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