Swagelok® Atomic Layer Deposition (ALD) Valves
Swagelok ultrahigh-purity atomic layer deposition (ALD) valves offer the ultrahigh cycle life, high-speed actuation, flow rates, thermal immersibility, and extreme cleanliness needed to enable precise dosing and maximize chip yield in advanced semiconductor manufacturing applications.
Request ALD Valve InformationSince introducing the world to ALD valves, we have worked closely with semiconductor tool OEMs and fabricators to advance ALD dose control—helping customers keep pace with rapid innovation, accelerate development timelines, and improve chip yield in increasingly complex processes. Across our full portfolio, Swagelok® ALD valves deliver the precision, consistency, cleanliness, and ultrahigh cycle life required to maintain stable performance in demanding applications.
Designed for tight flow control, fast actuation, and high-temperature stability, our valves reduce dose variability—supporting higher wafer yield and faster development cycles to help customers bring next-generation technologies to market faster.
Our ALD ultrahigh-purity valves feature:
- Ultrahigh cycle life with high-speed actuation
- Flow coefficients ranging from 0.27 Cv to 1.7 Cv
- Temperature capability up to 482°F (250°C) for specified models
- Field flow adjustability options available
- Electronic or optical actuator position-sensing option
- Suitable for ultrahigh-purity applications with 316L VIM-VAR stainless steel and alloy 22 body options
- Modular surface-mount, tube butt weld, and VCR® end connections available
- Available in single body as well as additive manufactured (AM) manifold offerings
ALD-Ventile – Kategorien
Ultrahochreine Membranventile - Serien ALD3 und ALD6
Die ALD3- und ALD6-Membranventile bieten eine extrem hohe Lebensdauer, schnelle Betätigung und hohe Leistung bei der Atomlagenabscheidung.
Ultrahochreine Membranventile für Anwendungen mit hohem Durchfluss, Serie ALD20
Das fortschrittliche, ultrahochreine ALD20-Ventil bietet 2–3 mal höhere Durchflussraten als andere ALD-Ventile.
Ultrahochreine Membranventile, Serie ALD7A
Das ALD7A-Membranventil von Swagelok für ultrahochreine Anwendungen bietet präzise und konsistente Ergebnisse für eine maximale Chipausbeute in der Halbleiterfertigung.
Ultrahochreine Membranventile, Serie ALD7C
Die ultrahochreinen ALD7C-Membranventile von Swagelok bieten eine hohe Leistung, Geschwindigkeit und Zuverlässigkeit für hochkomplexe ALD-Anwendungen.
Atomic Layer Deposition (ALD) Valve Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Besonders hohe Zykluslebensdauer bei hoher Betätigungsgeschwindigkeit; Cv-Bereich von 0,27 bis 0,62; Mit Hochtemperatursteuerköpfen einsetzbar bis 200°C (392°F); Optionaler elektronischer Steuerkopf-Stellungsmelder; Geeignet für ultrahochreine Anwendungen mit Körper aus Edelstahl 316L VIM-VAR; VCR®, Stumpfschweißenden und modulare Bauteile für Flächenbefestigung
Deploying New Precursors with Optimized Valves
Next-generation semiconductor precursors pose new challenges in manufacturing. Optimized system design and ALD valve technology can help you stay ahead.
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