Swagelok® Atomic Layer Deposition (ALD) Valves
Swagelok ultrahigh-purity atomic layer deposition (ALD) valves offer the ultrahigh cycle life, high-speed actuation, flow rates, thermal immersibility, and extreme cleanliness needed to enable precise dosing and maximize chip yield in advanced semiconductor manufacturing applications.
Request ALD Valve InformationSince introducing the world to ALD valves, we have worked closely with semiconductor tool OEMs and fabs to deliver advanced ALD valve technology that provides the extreme levels of precision, consistency, cleanliness, and high cycle life necessary to keep up with the quick pace of innovation in the marketplace. Swagelok® ALD valves can support increased chip production efficiency and overcome the challenges that are often associated with ALD processes.
Our ALD ultrahigh-purity valves feature:
- Ultrahigh cycle life with high-speed actuation
- Cv ranging from 0.27 to 1.7
- Temperature capability up to 392°F (200°C) for specified models
- Electronic or optical actuator position-sensing option
- Cleanliness suitability for ultrahigh-purity applications
- Modular surface mount, tube butt weld, and VCR® end connections
ALD（原子層蒸着）用バルブのカテゴリー
超高純度用ダイヤフラム・バルブ、ALD3 / ALD6シリーズ
ALD3／ALD6ダイヤフラム・バルブは、非常に優れたサイクル・ライフおよび高速作動という特徴を備えており、原子層蒸着アプリケーションにおいて高いパフォーマンスを発揮します。
超高純度用ダイヤフラム・バルブ、ALD7シリーズ
Swagelok® ALD7超高純度用ダイヤフラム・バルブは、半導体製造アプリケーションにおいてデバイスの歩留まりを最大化するのに必要な精度および一貫性を備えています。
Atomic Layer Deposition (ALD) Valve Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
■ サイクル・ライフが非常に優れ、高速で開閉可能／■ 流量係数（Cv 値）：0.27 から1.7 まで／■ 最高使用温度：200°C（ALD20 の場合）／■ オプション：電気式インジケーター、光学式ポジション・センサーなど／■ 超高純度用途に適した316L VIM-VAR ステンレス鋼製ボディ／■ エンド・コネクション・タイプ：集積モデル、チューブ突き合わせ溶接、VCR ® メタル・ガスケット式面シール継手
One New Valve: Three Reasons It Could Change Semiconductor Manufacturing
Find out how the latest innovation in atomic layer deposition (ALD) valve technology is changing the game for high-tech semiconductor manufacturers.
Unlock More of the Periodic TableSwagelok Resources Curated for You
최적의 합금으로 반도체 수율 향상
반도체 제조업체가 어떻게 하면 핵심 유체 시스템 부품에 적절한 합금을 선택하여 종합적인 생산 수율과 장기 수익성을 높일 수 있는지 알아보십시오.
Q&A: 반도체 제조의 과거와 현재, 그리고 미래
반도체 장비 OEM, 마이크로칩 제조업체, 유체 시스템 솔루션 제공업체가 어떻게 지난 몇십 년 동안 협력을 통해 반도체 시장이 무어의 법칙에 따른 수요를 충족하도록 해왔으며, 이제부터는 어떻게 해야 할 것인지 알아보십시오.
광섬유 장비 제조업체가 맞춤형 솔루션으로 효율을 높인 사례
로젠달 넥스트롬(Rosendahl Nextrom)은 1980년대부터 Swagelok에 의존하여 사업을 확장해왔습니다. 이 회사가 경쟁업체보다 앞서며 업계 리더 지위를 유지하도록 해준 솔루션에 대해 자세히 알아보십시오.
最先端科学で信頼できる流体システム・ソリューション
フィンランドの希釈冷凍機メーカーであるブルーフォース社が、量子コンピューターや実験物理学などに欠かせない流体システム部品やソリューションに関して、スウェージロックに信頼を寄せている理由を紹介します。