Swagelok® Ultrahigh-Purity Valves for High-Flow Atomic Layer Processing Applications (ALD20 Series)
Swagelok ALD20 ultrahigh-purity valves offer a high flow capacity ideal for atomic layer deposition processes that require low-vapor pressure precursor gases.
Request ALD20 Valve InformationThe high-flow Swagelok® ALD20 ultrahigh-purity valve provides the reliability and performance expected of Swagelok® ALD valves while also enabling previously unattainable temperature stability and flow possibilities. It enables manufacturers to experiment with different processes and low-vapor pressure chemistries to achieve the uniform gas deposition needed to develop advanced technology without significantly changing processes.
The Swagelok ALD20 valve can:
- Deliver a of 1.2 Cv flow rate in the same footprint (1.5 in.) as existing ALD valves, offering improved performance without requiring retooling
- Provide an even greater 1.7 Cv with a slightly larger (1.75 in.) standard variant—the highest flow rate currently available from an ultrahigh-cycle life, ultrahigh-purity valve
- Be immersed in a gas box from 50°F (10°C) up to 392°F (200°C), eliminating the need to isolate the actuator during heating and improving deposition consistency
- Provide enhanced corrosion resistance with 316L VIM-VAR stainless steel or Alloy 22 body material options
- Support clean operation over the course of an ultrahigh cycle life for process integrity thanks to a highly polished bellows with a 5 μin. Ra finish
- Deliver high-speed (<10ms) repeatable actuation for precise, consistent flow to meet dosing requirements
Custom-set flow coefficients are also available.
Learn How The ALD20 Valve Helps Overcome Semiconductor Processing Hurdles
ALD20 Valve Specifications
| Working Pressure | Vacuum to 20 psig (1.4 bar) |
| Burst Pressure | >3200 psig (220 bar) |
| Actuation Pressure | 70 to 90 psig (4.9 to 6.2 bar) |
| Temperature | 50° to 392°F (10° to 200°C) |
| Flow Coefficient (Cv) | 1.2 (MSM) or 1.7 (straight pattern) |
| Body Materials | 316L VIM-VAR or Alloy 22 |
| Bellows Material | Alloy 22 (5 μin. Ra finished) |
| End Connections | Type (Size): Female VCR® fitting (1/2 in.), rotatable male VCR fitting (1/2 in.), tube butt weld, 0.50 in. long (1/2 in. x 0.049 in.), modular surface-mount high-flow C-seal (1.5 in.) |
Need help with ALD valve selection?
ALD20シリーズ・バルブのカタログ
構成部品とその材質、使用圧力、使用温度、オプション、アクセサリーなど、製品に関する詳細情報につきましては、以下の資料をご参照ください。
■ サイクル・ライフが非常に優れ、高速で開閉可能／■ 流量係数（Cv 値）：0.27 から1.7 まで／■ 最高使用温度：200°C（ALD20 の場合）／■ オプション：電気式インジケーター、光学式ポジション・センサーなど／■ 超高純度用途に適した316L VIM-VAR ステンレス鋼製ボディ／■ エンド・コネクション・タイプ：集積モデル、チューブ突き合わせ溶接、VCR ® メタル・ガスケット式面シール継手
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