Swagelok® Diaphragm-Sealed Valves
Swagelok diaphragm-sealed valves improve system efficiency while providing effective flow shutoff by minimizing entrapment areas and facilitating purging with a fully swept flow path. They have long cycle lives and are available in a variety of sizes, materials, and configurations to meet the system requirements of high-purity and ultrahigh-purity (UHP) applications.
View Diaphragm ValvesSwagelok diaphragm-sealed valves come in various sizes, materials, and configurations to meet the needs of high-purity and UHP applications. They feature flow coefficients ranging from 0.20 to 13. Their fully swept flow paths and corrosion-resistant construction make them ideal for applications where cleanliness is crucial. Users can choose from manual, pneumatic, and locking actuator options.
Swagelok diaphragm-sealed valves can be used in atomic layer deposition (ALD), high-flow, modular gas system, thermal-immersion, and ultrahigh-purity applications requiring fluoropolymer component construction.
- Swagelok springless diaphragm valves for modular gas systems are easy to install, provide a visual indication of flow direction, and have a seat design that improves thermal stability
- Swagelok bulk gas diaphragm valves offer a combination of strength, flexibility, and cycle life to support a wide range of ultrahigh-purity shutoff, bulk-gas distribution, and isolation applications
- Swagelok thermal-immersion diaphragm valves can be entirely contained within a high-temperature, high-purity environment, making them strong options for ALD and precursor delivery applications
- Swagelok ultrahigh-purity fluoropolymer diaphragm valves offer a strong solution for UHP chemical distribution, DI water, and bulk chemical delivery systems
Have questions about diaphragm-sealed valves?
다이어프램 밸브 카테고리
Springless Diaphragm Valves for Modular Gas Systems, 1.125 in, DE Series
Надежные и современные регулирующие клапаны с беспружинной конструкцией идеально подходят для эффективной работы в модульных газовых системах.
UHP 개폐용 다이어프램 밸브, DP 시리즈
직선형 패턴 및 수동 작동, 통합형 액추에이터가 있는 멀티포트 및 모듈 조립형(MSM)의 초고순도 차단 다이어프램 밸브를 알아보십시오.
UHP 대유량 다이어프램 밸브, DF 시리즈
스프링 없는 대유량 다이어프램 밸브로 사이클 수명을 늘려보십시오. 스프링이나 나사가 없으므로 청정도가 개선되며, 유체가 잔류하지 않는 매끄러운 유로로 퍼지 성능이 강화됩니다.
Высокотемпературные погружные мембранные клапаны, серия DH
Для применения в высокотемпературной среде, например в системах с атомно-слоевым осаждением (ALD) и системах доставки прекурсоров используются высокотемпературные погружные мембранные клапаны.
Фторполимерные мембранные клапаны сверхвысокой степени чистоты, серия DRP
Обеспечьте оптимальную производительность и долговечность сверхчистых (UHP) химических систем за счет беспрепятственного пути прохождения потока, чтобы свести к минимуму загрязнение флюидов.
고순도 고압 다이어프램 밸브, DL 및 DS 시리즈
완전 밀폐 소프트시트 스템 팁, 표준 하단, 판넬 마운팅으로 반복적 차단이 가능한 고순도, 고압 다이어프램 밸브를 알아보십시오.
벌크 가스 다이어프램 밸브, LD 시리즈
High-flow application bulk-gas distribution diaphragm, designed to meet ultrahigh-purity shutoff, bulk-gas distribution, and isolation application needs.
Diaphragm-Sealed Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Features: 1.125 in. C-seal and W-seal designs; Available in two- and three-port configurations; Compact pneumatic and manual actuators; Pneumatic actuator indicator ball: red for normally closed, green for normally open; Fixed orientation of actuator to body for consistency of installation; Corner chamfers on outlet side of body for visual indication of flow direction
Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance at 220 degrees C (428 degrees F) for high-temperature processes.
Features: Pneumatic and quarter-turn manual 2-way and 3-way models; pneumatic and manual models with adjustable flow and bypass features; DuPont® Teflon® modified PTFE wetted parts and polypropylene actuator; Meet SEMI Standard F57-0301 for ultrahigh-purity system components; Fine thread flare and Nippon Pillar® Super 300 end connections standard; space saver and other end connections available; Custom manifolds and subassemblies available
Бессальниковая цельнометаллическая герметизация; Рабочее давление от вакуума до 241 бара (3500 фунтов на кв. дюйм, ман.); Температура от -73 до 121°C (от -100 до 250°F)
Применимы в сверхчистых системах; Корпус из нержавеющей стали 316L VIM-VAR; Модели низкого и высокого давления; Соединения VCR®, соединения под приварку встык и модульные торцевые соединения для монтажа на поверхности; Ручные и пневматические приводы
Характеристики: Рабочее давление до 300 фунтов на кв. дюйм, ман. (20,6 бара); отсечение, распределение больших объемов газа и изолирование; литые, кованные корпуса из нержавеющей стали, а также корпуса из прутковых заготовок; торцевые соединения от 1/4 до 1 дюйма и от 12 до 25 мм
Характеристики: Корпус из нержавеющей стали 316L VAR; рабочее давление до 300 фунтов на кв. дюйм, ман. (20,6 бара); торцевые соединения размером 1/4, 3/8 и 1/2 дюйма; 10 и 12 мм
関連資料／コラム記事
産業用流体システムに適したバルブを選定する方法
産業用流体システムやサンプリング・システムの設計アプリケーションに適したバルブを選定するためのSTAMPEDメソッドの適用方法を紹介します。
Minimize the Costs of Fugitive Emissions with Low-E Valves
Fugitive emissions are a growing concern in the chemical and petroleum refining industry. Certified low-emissions (Low-E) valves can protect your facility and bottom line. Learn what they are, how they are tested, and how they can help you in this post.
How to Isolate Industrial Fluid Systems with Block Valves
The isolation of industrial fluid system lines prior to maintenance is vital to plant safety. One of the safest ways to isolate a fluid system line is to install two block valves. Learn how to design proper configurations for your system.
One New Valve. Three Reasons It Could Change Semiconductor Manufacturing
Find out how the latest innovation in atomic layer deposition (ALD) valve technology is changing the game for high-tech semiconductor manufacturers.