Swagelok®超高純度用フルオロポリマー・ダイヤフラム・バルブ（DRPシリーズ）
Swagelok 超高純度用フルオロポリマー・ダイヤフラム・バルブ DRPシリーズは、超高純度の薬液供給システム、超純水システム、薬液のバルク供給システムに対して強力なソリューションを提供します。
詳細について問い合わせるSwagelok® DRP series valves are designed with modified PTFE wetted parts for superior chemical resistance. A patented fluid flow path reduces fluid entrapment, allowing for quick purging of process fluids and minimizing the risk of contamination. The design also limits fluid shear, preventing slurry agglomeration and improving process efficiency.
The modified PTFE diaphragm is optimized for durability and long cycle life, with a patented shape that reduces stress during operation. A reinforced diaphragm rim seals the valve cavity, preventing process fluid contamination and reducing seat strain.
DRP series diaphragm valves are available with either pneumatic or manual actuation and adjustable flow and bypass options for precise control. They meet SEMI Standard F57-0301, making them perfect for ultrahigh-purity (UHP) applications like chemical mechanical planarization (CMP) slurry systems, DI water systems, and bulk chemical delivery systems.
Specifications
| Pressure Rating | Up to 100 psig (6.8 bar) |
| Media Temperature | 73° to 212°F (23° to 100°C) |
| Flow Coefficient | Up to 10.2 |
| Body, Diaphragm Material | Modified PTFE |
| End Connections | Type: Fine thread flare and Nippon Pillar Super 300® standard Size: 1/4 to 1 1/4 in. and 6 to 25 mm Configuration: two- and three-way manual and pneumatic shutoff; adjustable flow and bypass models |
Want to optimize your ultrahigh-purity fluid system with the DRP series valve?
UHP Fluoropolymer Diaphragm Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Features: Pneumatic and quarter-turn manual 2-way and 3-way models; pneumatic and manual models with adjustable flow and bypass features; DuPont® Teflon® modified PTFE wetted parts and polypropylene actuator; Meet SEMI Standard F57-0301 for ultrahigh-purity system components; Fine thread flare and Nippon Pillar® Super 300 end connections standard; space saver and other end connections available; Custom manifolds and subassemblies available
Calculate Flow Rate for the Right Valve Selection
Use our valve flow coefficient (Cv) calculator to chose a valve sized correctly for your needs.
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