Swagelok® Diaphragm-Sealed Valves
Diaphragm-sealed valves minimize entrapment areas and facilitate purging with a fully swept flow path to improve system efficiency while providing effective flow shutoff. A variety of sizes, materials, and configurations, including atomic layer deposition, thermal immersion, and springless, meet the system requirements of high-purity and ultrahigh-purity applications.
Diaphragm-Sealed Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Features: 1.125 in. C-seal and W-seal designs; Available in two- and three-port configurations; Compact pneumatic and manual actuators; Pneumatic actuator indicator ball: red for normally closed, green for normally open; Fixed orientation of actuator to body for consistency of installation; Corner chamfers on outlet side of body for visual indication of flow direction
Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance at 220 degrees C (428 degrees F) for high-temperature processes.
Features: Pneumatic and quarter-turn manual 2-way and 3-way models; pneumatic and manual models with adjustable flow and bypass features; DuPont® Teflon® modified PTFE wetted parts and polypropylene actuator; Meet SEMI Standard F57-0301 for ultrahigh-purity system components; Fine thread flare and Nippon Pillar® Super 300 end connections standard; space saver and other end connections available; Custom manifolds and subassemblies available
Features: Packless, all-metal containment; Working pressures from vacuum to 3500 psig (241 bar); Temperatures from –100 to 250°F (–73 to 121°C)
Features: Suitable for ultrahigh-purity applications; 316L VIM-VAR stainless steel body; Low-pressure and high-pressure models; VCR®, tube butt weld, and modular surface-mount end connections; Manual or pneumatic actuation
Features: Working pressures up to 300 psig (20.6 bar); Shutoff, bulk-gas distribution, and isolation service; Cast, forged, and bar stock stainless steel body material; 1/4 to 1 in. and 12 to 25 mm end connections
Features: 316L VAR stainless steel body; Working pressures up to 300 psig (20.6 bar); 1/4, 3/8, and 1/2 in.; 10 and 12 mm end connections
Features: 316L stainless steel and modified PTFE wetted parts; Variety of compact multivalve, multiport configurations; Choice of sanitary clamp and butt weld end connections; Choice of pneumatic or manual actuators in plastic or aluminum; Five sizes from 1/2 to 2 in.
The Right Valve Can Make All the Difference
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Swagelok Resources Curated for You
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Our diaphragm-sealed valves are designed in a wide variety of sizes, materials, and configurations to meet the needs of high-purity and ultrahigh-purity (UHP) applications with flow coefficients from 0.20 up to 13 and working pressures up to 3500 psig (241 bar).
Diaphragm-sealed valves provide effective shutoff for your system flow and have a long cycle life. Swagelok’s diaphragm-sealed valve offerings include atomic layer deposition (ALD), springless for high-flow, high-performance, and modular gas systems, thermal-immersion, and ultrahigh-purity fluoropolymer. Manual, pneumatic, and locking actuator options are available.