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ALD(原子層蒸着)用バルブ

Swagelok® Atomic Layer Deposition (ALD) Valves

Swagelok ultrahigh-purity atomic layer deposition (ALD) valves offer the ultrahigh cycle life, high-speed actuation, flow rates, thermal immersibility, and extreme cleanliness needed to enable precise dosing in advance semiconductor manufacturing applications.

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Our high-performance ALD valves are a key example of how Swagelok has long displayed responsive technical leadership in the semiconductor manufacturing industry. Since introducing the world to ALD valve technology, Swagelok has worked closely with semiconductor industry customers to understand their needs, then create ALD valves that provide the extreme levels of precision, consistency, cleanliness, and high cycle life necessary to keep up with the quick pace of innovation in the marketplace. Our ALD ultrahigh-purity valves feature:

  • Ultrahigh cycle life with high-speed actuation
  • Flow coefficients ranging from 0.27 to 1.7
  • Full immersibility up to 392°F (200°C) with thermal actuators
  • Suitability for ultrahigh-purity applications with standard 316L VIM-VAR stainless steel valve bodies
  • Modular surface-mount, tube butt weld, and Swagelok VCR® end connections
  • Electronic or optical actuator position-sensing option

Atomic Layer Deposition (ALD) Valves Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

半導体業界向けの超高純度用(UHP)ALD20バルブのクリーンルームでの組み立て

One New Valve: Three Reasons It Could Change Semiconductor Manufacturing

Find out how the latest innovation in atomic layer deposition (ALD) valve technology is changing the game for high-tech semiconductor manufacturers.

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