Swagelok® Atomic Layer Deposition (ALD) Valves
Swagelok ultrahigh-purity atomic layer deposition (ALD) valves offer the ultrahigh cycle life, high-speed actuation, flow rates, thermal immersibility, and extreme cleanliness needed to enable precise dosing and maximize chip yield in advanced semiconductor manufacturing applications.
Request ALD Valve InformationSince introducing the world to ALD valves, we have worked closely with semiconductor tool OEMs and fabs to deliver advanced ALD valve technology that provides the extreme levels of precision, consistency, cleanliness, and high cycle life necessary to keep up with the quick pace of innovation in the marketplace. Swagelok® ALD valves can support increased chip production efficiency and overcome the challenges that are often associated with ALD processes.
Our ALD ultrahigh-purity valves feature:
- Ultrahigh cycle life with high-speed actuation
- Cv ranging from 0.27 to 1.7
- Temperature capability up to 392°F (200°C) for specified models
- Electronic or optical actuator position-sensing option
- Cleanliness suitability for ultrahigh-purity applications
- Modular surface mount, tube butt weld, and VCR® end connections
Atomic Layer Deposition (ALD) Valves Categories
Ultrahigh-Purity Diaphragm Valves, ALD3 and ALD6 Series
ALD3 and ALD6 diaphragm valves offer ultrahigh cycle life, high-speed actuation, and strong performance in atomic layer deposition applications.
Ultrahigh-Purity Diaphragm Valves, ALD7 Series
The Swagelok® ALD7 ultrahigh-purity diaphragm valve offers the precision and consistency needed to maximize chip yields in semiconductor manufacturing applications.
Ultrahigh-Purity Valves for High-Flow Applications, ALD20 Series
Advance atomic layer deposition technology with flow rates 2–3x higher than other ALD valves with the ALD20 ultrahigh-purity valve.
Atomic Layer Deposition (ALD) Valve Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
ALD 3, 6, and 7 Diaphragm Valves and ALD20 Bellows: Ultrahigh cycle life, high-speed actuation; Up to 392°F (200°C) w thermal actuators; Electronic actuator position-sensing; ultrahigh-purity applications; High flow capacity, PFA seat, Normally closed pneumatic actuation, Alloy 22 available
One New Valve: Three Reasons It Could Change Semiconductor Manufacturing
Find out how the latest innovation in atomic layer deposition (ALD) valve technology is changing the game for high-tech semiconductor manufacturers.
Unlock More of the Periodic TableSwagelok Resources Curated for You
Improve Semiconductor Yield with Optimized Alloys
Discover how semiconductor fabricators can improve end-to-end production yields and improve long-term profitability by selecting the right metals for critical fluid system components.
Q&A: Semiconductor Manufacturing Past, Present, and Future
Find out how collaboration between semiconductor tool OEMs, microchip manufacturers, and fluid system solutions providers has enabled the semiconductor market to keep up with the demands of Moore’s Law for decades, and where we go from here.
Fiber Optics Equipment Manufacturer Increases Efficiency with Customized Solutions
Since the 1980s, Rosendahl Nextrom has depended on Swagelok to move its business forward. Learn more about the solutions that allowed the company to outpace its competitors and remain an industry leader.
Reliable Fluid System Solutions for the Scientific Frontier
Learn why Finnish dilution refrigerator manufacturer Bluefors trusts Swagelok for fluid system components and solutions that help enable quantum computing, experimental physics, and more.