스웨즈락® 초고순도 다이어프램 밸브(ALD3 및 ALD6 시리즈)
스웨즈락 ALD3 및 ALD6 시리즈 다이어프램 밸브는 매우 긴 수명, 고속 개폐 및 최대 0.62의 유량계수를 제공하여 반도체 제조업체들이 원자층 증착(ALD) 반도체 제조에 필요한 분사량 조절을 가능케 합니다.
추가 정보 요청Ultrahigh-purity Swagelok® ALD3 and Swagelok® ALD6 diaphragm valves are designed to provide semiconductor manufacturers with dependable, high-speed dosing of precursor gases used to build up microchips layer by layer in deposition chambers. These high-performance ultrahigh-purity valves feature an ultrahigh cycle life, full immersibility at elevated temperatures, and suitability for ultrahigh-purity applications.
The diaphragms used in ALD3 and ALD6 valves are composed of a cobalt-based superalloy material that provides strength and corrosion resistance. Their valve bodies are 316L VIM-VAR stainless steel, making them suitable for ultrahigh-purity applications. The valve seats are made of fluorinated high-purity PFA to enable a broad range of chemical compatibility and resistance to swelling and contamination. These valves can be set up for normally closed and normally open pneumatic actuation, and they are available in a variety of configurations to suit different installation requirements.
See How ALD Valves Improve Semiconductor Manufacturing
ALD3 and ALD6 Valve Specifications
| Working Pressure | Vacuum to 145 psig (10.0 bar) |
| Burst Pressure | >3200 psig (220 bar) |
| Actuation Pressure | 50 to 90 psig (3.5 to 6.2 bar) |
| Temperature | 32° to 392°F (0° to 200°C) |
| Flow Coefficient (Cv) | 0.27 or 0.62 |
| Body Materials | 316L VIM-VAR stainless steel |
| Diaphragm Material | Cobalt-based superalloy |
| End Connections | Type (Size): Female VCR® face seal fitting (1/4 in. to 1/2 in.), male VCR face seal fitting (1/4 in. to 1/2 in.), modular surface mount high-flow C-seal (1.125 in. to 1.5 in.) |
Have questions about ALD valves?
ALD3 and ALD6 Series Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
원자층 증착 (ALD) 용 다이어프램 밸브 고속 개폐 시에도 매우 긴 수명 유지 ; Cv 범위 0.27 ~ 0.62; 고온용 개폐기로 200°C (392°F)까지 사용가능; 전자 개폐기 위치 감지 옵션; 초고순도 사양에 적합한 316L VIM-VAR 스텐레스강 몸체; VCR®, 튜브 맞대기 용접 및 블럭 조립식 연결구
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