Swagelok^® Ultrahochreine Membranventile für die Atomlagenabscheidung der Serie ALD7

Das ultrahochreine ALD7-Ventil von Swagelok sorgt dafür, dass das Durchflussverhalten, die Durchflusskapazität, die Betätigungsgeschwindigkeit, die Temperaturwerte sowie die Reinheit sichergestellt sind, die zur Maximierung des Chip-Durchsatzes in neuen oder existierenden Halbleiterproduktionsanlagen erforderlich sind.

Informationen zu ALD7-Ventilen anfordern

The Swagelok^® ALD7 ultrahigh-purity diaphragm valve for atomic layer deposition (ALD) processing enables semiconductor tool manufacturers and chip fabricators to increase viable chip yields and enhances profitability by enabling the flow consistency and capacity, actuator speed, and performance at high temperatures necessary to overcome production processes limitations. It provides consistent performance from valve to valve, dose to dose, and chamber to chamber over an ultrahigh cycle life.

The Swagelok ALD7 valve:

Delivers quick, precise dosing over the course of millions of cycles in even the most demanding applications and features enhanced actuator technology with a response time as low as 5 ms
Is resistant to corrosive gases with a valve body comprised of proprietary ultrahigh-purity Swagelok 316L VIM-VAR stainless steel
Can be heated up to 200°C while keeping the pneumatic actuator below maximum operating temperature of 150°C
Delivers a flow coefficient (C_v) up to 0.7 (with optional custom (factory-set) versions available that deliver a flow coefficient of 0.5–0.7 C_v)
Maintains the same footprint as Swagelok industry-standard ALD valves and features an integrated thermal isolator to maximize limited space near the reaction chamber

See ALD7 Valves Up Close

ALD7 Valve Specifications

Working Pressure	Vacuum to 145 psig (10.0 bar)
Burst Pressure	>3200 psig (220 bar)
Actuation Pressure	60 to 120 psig (4.1 to 8.27 bar)
Temperature Rating	Standard valve body from 32°F (0°C) to 392°F (200°C)
Flow Coefficient	Standard 0.7 C_v (factory set)
Body Materials	316L VIM-VAR stainless steel
Diaphragm Material	Cobalt-based superalloy
End Connections	Type: VCR^® fittings, tube butt weld, 1.5 in. modular surface-mount high flow C-seal

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ALD7 Series Valves Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

超高純度用バルブ原子層プロセス用

■ サイクル・ライフが非常に優れ、高速で開閉可能／■ 流量係数（Cv 値）：0.27 から1.7 まで／■ 最高使用温度：200°C（ALD20 の場合）／■ オプション：電気式インジケーター、光学式ポジション・センサーなど／■ 超高純度用途に適した316L VIM-VAR ステンレス鋼製ボディ／■ エンド・コネクション・タイプ：集積モデル、チューブ突き合わせ溶接、VCR ® メタル・ガスケット式面シール継手

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