Swagelok®ALD（原子層蒸着）用バルブ
Swagelok超高純度用ALD（原子層蒸着）用バルブは、非常に優れたサイクル・ライフ、高速作動、流量、高温対応性、極めて高い清浄度を備えており、最先端の半導体製造アプリケーションにおいて正確なプリカーサーの供給を実現し、デバイスの歩留まりを最大化します。
ALD用バルブについて問い合わせるSince introducing the world to ALD valves, we have worked closely with semiconductor tool OEMs and fabs to deliver advanced ALD valve technology that provides the extreme levels of precision, consistency, cleanliness, and high cycle life necessary to keep up with the quick pace of innovation in the marketplace. Swagelok® ALD valves can support increased chip production efficiency and overcome the challenges that are often associated with ALD processes.
Our ALD ultrahigh-purity valves feature:
- Ultrahigh cycle life with high-speed actuation
- Cv ranging from 0.27 to 1.7
- Temperature capability up to 392°F (200°C) for specified models
- Electronic or optical actuator position-sensing option
- Cleanliness suitability for ultrahigh-purity applications
- Modular surface mount, tube butt weld, and VCR® end connections
Категории клапанов для атомно-слоевого осаждения (ALD)
Мембранные клапаны сверхвысокой степени чистоты, серии ALD3 и ALD6
ALD3／ALD6ダイヤフラム・バルブは、非常に優れたサイクル・ライフおよび高速作動という特徴を備えており、原子層蒸着アプリケーションにおいて高いパフォーマンスを発揮します。
超高純度用ダイヤフラム・バルブ、ALD7シリーズ
Swagelok® ALD7超高純度用ダイヤフラム・バルブは、半導体製造アプリケーションにおいてデバイスの歩留まりを最大化するのに必要な精度および一貫性を備えています。
Atomic Layer Deposition (ALD) Valve Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
■ サイクル・ライフが非常に優れ、高速で開閉可能／■ 流量係数（Cv 値）：0.27 から1.7 まで／■ 最高使用温度：200°C（ALD20 の場合）／■ オプション：電気式インジケーター、光学式ポジション・センサーなど／■ 超高純度用途に適した316L VIM-VAR ステンレス鋼製ボディ／■ エンド・コネクション・タイプ：集積モデル、チューブ突き合わせ溶接、VCR ® メタル・ガスケット式面シール継手
One New Valve: Three Reasons It Could Change Semiconductor Manufacturing
Find out how the latest innovation in atomic layer deposition (ALD) valve technology is changing the game for high-tech semiconductor manufacturers.
Unlock More of the Periodic TableSwagelok Resources Curated for You
Improve Semiconductor Yield with Optimized Alloys
Discover how semiconductor fabricators can improve end-to-end production yields and improve long-term profitability by selecting the right metals for critical fluid system components.
Q&A: 반도체 제조의 과거와 현재, 그리고 미래
반도체 장비 OEM, 마이크로칩 제조업체, 유체 시스템 솔루션 제공업체가 어떻게 지난 몇십 년 동안 협력을 통해 반도체 시장이 무어의 법칙에 따른 수요를 충족하도록 해왔으며, 이제부터는 어떻게 해야 할 것인지 알아보십시오.
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Reliable Fluid System Solutions for the Scientific Frontier
Learn why Finnish dilution refrigerator manufacturer Bluefors trusts Swagelok for fluid system components and solutions that help enable quantum computing, experimental physics, and more.