Swagelok®サーマル・イマージョン・ダイヤフラム・バルブ（DHシリーズ）
Swagelokサーマル・イマージョン・ダイヤフラム・バルブ DHシリーズは高速での開閉が可能で、高温プロセスで最適なパフォーマンスを発揮します。
詳細について問い合わせるSwagelok® DH series thermal-immersion diaphragm valves are designed for applications where the valve needs to be entirely contained within a high-temperature, high-purity environment such as atomic layer deposition (ALD) and precursor delivery applications. These valves have a fully contained high-purity PFA seat that provides compatibility with a broad range of chemicals and excellent resistance to swelling and contamination. The fully swept flow path in the body minimizes entrapment areas and maximizes flow capacity.
Flow coefficients up to 0.60, a variety of 1/4 and 3/8 in. end connections, and pneumatically and manually actuated models are available to meet a wide range of system needs. The “normally closed” is actuator capable of a valve opening or closing time of less than 5 ms, and the valve is designed for optimal performance at 220°C (428°F).
Want to know more about DH series thermal-immersion valves?
Thermal-Immersion Diaphragm Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance at 220 degrees C (428 degrees F) for high-temperature processes.
Calculate Flow Rate for the Right Valve Selection
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하나의 새로운 밸브 반도체 제조를 바꿀 수 있었던 세 가지 이유
최근의 원자층 증착(atomic layer deposition, ALD) 밸브 기술 혁신이 하이테크 반도체 제조업체의 판도를 어떻게 바꾸고 있는지 알아보십시오.