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Swagelok® Diaphragm-Sealed Valves
Diaphragm-sealed valves minimize entrapment areas and facilitate purging with a fully swept flow path to improve system efficiency while providing effective flow shutoff. A variety of sizes, materials, and configurations, including atomic layer deposition, thermal immersion, and springless, meet the system requirements of high-purity and ultrahigh-purity applications.
Categories
![Bulk-Gas Diaphragm Valves, LD Series Bulk-Gas Diaphragm Valves, LD Series](https://www.swagelok.com/assets/images/sap-content/grid/bulk-gas-diaphragm-valves-ld-series-400x400.jpg?impolicy=product)
Bulk-Gas Diaphragm Valves, LD Series
High-flow application bulk-gas distribution diaphragm, designed to meet ultrahigh-purity shutoff, bulk-gas distribution, and isolation application needs.
![High-Purity High-Pressure Diaphragm Valves, DL and DS Series High-Purity High-Pressure Diaphragm Valves, DL and DS Series](https://www.swagelok.com/assets/images/sap-content/grid/SS-DLV51.jpg?impolicy=product)
High-Purity High-Pressure Diaphragm Valves, DL and DS Series
Discover high-purity, high-pressure diaphragm valves with repetitive shutoff with a fully contained softseat stem tip, standard bottom, and panel mounting.
![Multi-Valve Manifolds Multi-Valve Manifolds](https://www.swagelok.com/assets/images/sap-content/grid/6LVV-P1V222P-AA.jpg?impolicy=product)
Multi-Valve Manifolds
Find multi-valve manifolds with diaphragm-sealed valves. Designed for reliable performance, these manifolds offer high purity and precise fluid control.
![Spare Parts and Accessories Spare Parts and Accessories](https://www.swagelok.com/assets/images/sap-content/grid/MS-KIT-HDA.jpg?impolicy=product)
Spare Parts and Accessories
Browse quality valve maintenance components for diaphragm-sealed valve spare parts and accessories, including diaphragm and seal kits, stem kits, and actuator kits.
![Springless Diaphragm Valves for Modular Gas Systems, 1.125 in, DE Series Springless Diaphragm Valves for Modular Gas Systems, 1.125 in, DE Series](https://www.swagelok.com/assets/images/sap-content/grid/springless-diaphragm-valves-mod-gas-systems-400x400.jpg?impolicy=product)
Springless Diaphragm Valves for Modular Gas Systems, 1.125 in, DE Series
Reliable and enhanced control valves with a springless design are ideal for efficient operation in modular gas systems.
![Thermal-Immersion Diaphragm Valves, DH Series Thermal-Immersion Diaphragm Valves, DH Series](https://www.swagelok.com/assets/images/sap-content/grid/thermal-Immersion-diaphragm-valves-dh-400x400.jpg?impolicy=product)
Thermal-Immersion Diaphragm Valves, DH Series
Thermal-immersion diaphragm valves are used in high-temperature processes such as atomic-layer deposition (ALD) and precursor delivery applications.
![Ultrahigh-Purity Fluoropolymer Diaphragm Valves, DRP Series Ultrahigh-Purity Fluoropolymer Diaphragm Valves, DRP Series](https://www.swagelok.com/assets/images/sap-content/grid/ultrahigh-purity-fluoropolymer-diaphragm-valves-drp.jpg?impolicy=product)
Ultrahigh-Purity Fluoropolymer Diaphragm Valves, DRP Series
Ensure optimal performance and longevity in UHP chemical systems with a fully swept flow path to minimize stress and fluid contamination.
![Ultrahigh-Purity High-Flow Diaphragm Valves, DF Series Ultrahigh-Purity High-Flow Diaphragm Valves, DF Series](https://www.swagelok.com/assets/images/sap-content/grid/6LV-DFHFR4-P-GR.jpg?impolicy=product)
Ultrahigh-Purity High-Flow Diaphragm Valves, DF Series
Increase cycle life with high-flow, springless diaphragm valves. No springs or threads improve cleanliness and fully swept flow path enhances purging.
![Ultrahigh-Purity High-Pressure Diaphragm Valves, DPH Series Ultrahigh-Purity High-Pressure Diaphragm Valves, DPH Series](https://www.swagelok.com/assets/images/sap-content/grid/6LVV-DPHFR4-P1-C.jpg?impolicy=product)
Ultrahigh-Purity High-Pressure Diaphragm Valves, DPH Series
Ultrahigh-purity, high-pressure diaphragm valves are available in a variety of sizes, materials, and configurations for various applications.
![Ultrahigh-Purity Shutoff Diaphragm Valves, DP Series Ultrahigh-Purity Shutoff Diaphragm Valves, DP Series](https://www.swagelok.com/assets/images/sap-content/grid/6LVV-DPFR4-P-C.jpg?impolicy=product)
Ultrahigh-Purity Shutoff Diaphragm Valves, DP Series
View ultrahigh-purity shutoff diaphragm valves with straight pattern and manual actuation, multiport and modular surface mount (MSM) with integrated actuators.
Diaphragm-Sealed Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Features: 1.125 in. C-seal and W-seal designs; Available in two- and three-port configurations; Compact pneumatic and manual actuators; Pneumatic actuator indicator ball: red for normally closed, green for normally open; Fixed orientation of actuator to body for consistency of installation; Corner chamfers on outlet side of body for visual indication of flow direction
Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance at 220 degrees C (428 degrees F) for high-temperature processes.
Features: Pneumatic and quarter-turn manual 2-way and 3-way models; pneumatic and manual models with adjustable flow and bypass features; DuPont® Teflon® modified PTFE wetted parts and polypropylene actuator; Meet SEMI Standard F57-0301 for ultrahigh-purity system components; Fine thread flare and Nippon Pillar® Super 300 end connections standard; space saver and other end connections available; Custom manifolds and subassemblies available
Features: Packless, all-metal containment; Working pressures from vacuum to 3500 psig (241 bar); Temperatures from –100 to 250°F (–73 to 121°C)
Features: Suitable for ultrahigh-purity applications; 316L VIM-VAR stainless steel body; Low-pressure and high-pressure models; VCR®, tube butt weld, and modular surface-mount end connections; Manual or pneumatic actuation
Features: Working pressures up to 300 psig (20.6 bar); Shutoff, bulk-gas distribution, and isolation service; Cast, forged, and bar stock stainless steel body material; 1/4 to 1 in. and 12 to 25 mm end connections
Features: 316L VAR stainless steel body; Working pressures up to 300 psig (20.6 bar); 1/4, 3/8, and 1/2 in.; 10 and 12 mm end connections
![Swagelok flow coefficient (C<sub>v</sub>) calculator for valves](https://www.swagelok.com/assets/images/sap-content/featured-resources/cv-calculator-1400x610.jpg)
The Right Valve Can Make All the Difference
Use our valve flow coefficient (Cv) calculator to chose a valve sized correctly for your needs.
Use the ToolSwagelok Resources Curated for You
![Valve selection for fluid sampling systems](https://www.swagelok.com/assets/images/sap-content/featured-cms-blocks/valve-selection-260x154.jpg)
How to Select the Right Valves for Your Industrial Fluid System
Learn how to apply the practical STAMPED method to select the valves most suited to your industrial fluid or sampling system design applications.
![Reducing fugitive emissions in the chemical and refining industries](https://www.swagelok.com/assets/images/sap-content/featured-cms-blocks/fugitive-emissions-260x154.jpg)
Minimize the Costs of Fugitive Emissions with Low-E Valves
Fugitive emissions are a growing concern in the chemical and petroleum refining industry. Certified low-emissions (Low-E) valves can protect your facility and bottom line. Learn what they are, how they are tested, and how they can help you in this post.
![Block valves in an industrial fluid system](https://www.swagelok.com/assets/images/sap-content/featured-cms-blocks/isolate-block-valves-260x154.jpg)
How to Isolate Industrial Fluid Systems with Block Valves
The isolation of industrial fluid system lines prior to maintenance is vital to plant safety. One of the safest ways to isolate a fluid system line is to install two block valves. Learn how to design proper configurations for your system.
![Cleanroom assembly of a Swagelok ALD20 UHP valve for semiconductor industry use](https://www.swagelok.com/assets/images/sap-content/featured-cms-blocks/new-ald20-valve-260x154.jpg)
One New Valve. Three Reasons It Could Change Semiconductor Manufacturing
Find out how the latest innovation in atomic layer deposition (ALD) valve technology is changing the game for high-tech semiconductor manufacturers.
![DP series springless diaphragm valve](https://www.swagelok.com/assets/images/sap-content/additional-content/diaphragm-valves-640x440.jpg)
Diaphragm-Sealed Valves
Our diaphragm-sealed valves are designed in a wide variety of sizes, materials, and configurations to meet the needs of high-purity and ultrahigh-purity (UHP) applications with flow coefficients from 0.20 up to 13 and working pressures up to 3500 psig (241 bar).
Diaphragm-sealed valves provide effective shutoff for your system flow and have a long cycle life. Swagelok’s diaphragm-sealed valve offerings include atomic layer deposition (ALD), springless for high-flow, high-performance, and modular gas systems, thermal-immersion, and ultrahigh-purity fluoropolymer. Manual, pneumatic, and locking actuator options are available.