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Diaphragm-Sealed Valve

Swagelok® Diaphragm-Sealed Valves

Diaphragm-sealed valves minimize entrapment areas and facilitate purging with a fully swept flow path to improve system efficiency while providing effective flow shutoff. A variety of sizes, materials, and configurations, including atomic layer deposition, thermal immersion, and springless, meet the system requirements of high-purity and ultrahigh-purity applications.

Categories

Bulk-Gas Diaphragm Valves, LD Series

Bulk-Gas Diaphragm Valves, LD Series

High-flow application bulk-gas distribution diaphragm, designed to meet ultrahigh-purity shutoff, bulk-gas distribution, and isolation application needs.

High-Purity High-Pressure Diaphragm Valves, DL and DS Series

High-Purity High-Pressure Diaphragm Valves, DL and DS Series

Discover high-purity, high-pressure diaphragm valves with repetitive shutoff with a fully contained softseat stem tip, standard bottom, and panel mounting.

Multi-Valve Manifolds

Multi-Valve Manifolds

Find multi-valve manifolds with diaphragm-sealed valves. Designed for reliable performance, these manifolds offer high purity and precise fluid control.

Spare Parts and Accessories

Spare Parts and Accessories

Browse quality valve maintenance components for diaphragm-sealed valve spare parts and accessories, including diaphragm and seal kits, stem kits, and actuator kits.

Springless Diaphragm Valves for Modular Gas Systems, 1.125 in, DE Series

Springless Diaphragm Valves for Modular Gas Systems, 1.125 in, DE Series

Reliable and enhanced control valves with a springless design are ideal for efficient operation in modular gas systems.

Thermal-Immersion Diaphragm Valves, DH Series

Thermal-Immersion Diaphragm Valves, DH Series

Thermal-immersion diaphragm valves are used in high-temperature processes such as atomic-layer deposition (ALD) and precursor delivery applications.

Ultrahigh-Purity Fluoropolymer Diaphragm Valves, DRP Series

Ultrahigh-Purity Fluoropolymer Diaphragm Valves, DRP Series

Ensure optimal performance and longevity in UHP chemical systems with a fully swept flow path to minimize stress and fluid contamination.

Ultrahigh-Purity High-Flow Diaphragm Valves, DF Series

Ultrahigh-Purity High-Flow Diaphragm Valves, DF Series

Increase cycle life with high-flow, springless diaphragm valves. No springs or threads improve cleanliness and fully swept flow path enhances purging.

Ultrahigh-Purity High-Pressure Diaphragm Valves, DPH Series

Ultrahigh-Purity High-Pressure Diaphragm Valves, DPH Series

Ultrahigh-purity, high-pressure diaphragm valves are available in a variety of sizes, materials, and configurations for various applications.

Ultrahigh-Purity Shutoff Diaphragm Valves, DP Series

Ultrahigh-Purity Shutoff Diaphragm Valves, DP Series

View ultrahigh-purity shutoff diaphragm valves with straight pattern and manual actuation, multiport and modular surface mount (MSM) with integrated actuators.

Diaphragm-Sealed Valves Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

Swagelok flow coefficient (C<sub>v</sub>) calculator for valves

The Right Valve Can Make All the Difference

Use our valve flow coefficient (Cv) calculator to chose a valve sized correctly for your needs.

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Swagelok Resources Curated for You

Valve selection for  fluid sampling systems
How to Select the Right Valves for Your Industrial Fluid System

Learn how to apply the practical STAMPED method to select the valves most suited to your industrial fluid or sampling system design applications.

Reducing fugitive emissions in the chemical and refining industries
Minimize the Costs of Fugitive Emissions with Low-E Valves

Fugitive emissions are a growing concern in the chemical and petroleum refining industry. Certified low-emissions (Low-E) valves can protect your facility and bottom line. Learn what they are, how they are tested, and how they can help you in this post.

Block valves in an industrial fluid system
How to Isolate Industrial Fluid Systems with Block Valves

The isolation of industrial fluid system lines prior to maintenance is vital to plant safety. One of the safest ways to isolate a fluid system line is to install two block valves. Learn how to design proper configurations for your system.

Cleanroom assembly of a Swagelok ALD20 UHP valve for semiconductor industry use
One New Valve. Three Reasons It Could Change Semiconductor Manufacturing

Find out how the latest innovation in atomic layer deposition (ALD) valve technology is changing the game for high-tech semiconductor manufacturers.

DP series springless diaphragm valve

Diaphragm-Sealed Valves

Our diaphragm-sealed valves are designed in a wide variety of sizes, materials, and configurations to meet the needs of high-purity and ultrahigh-purity (UHP) applications with flow coefficients from 0.20 up to 13 and working pressures up to 3500 psig (241 bar).

Diaphragm-sealed valves provide effective shutoff for your system flow and have a long cycle life. Swagelok’s diaphragm-sealed valve offerings include atomic layer deposition (ALD), springless for high-flow, high-performance, and modular gas systems, thermal-immersion, and ultrahigh-purity fluoropolymer. Manual, pneumatic, and locking actuator options are available.

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