Swagelok® Diaphragm-Sealed Valves
Swagelok diaphragm-sealed valves improve system efficiency while providing effective flow shutoff by minimizing entrapment areas and facilitating purging with a fully swept flow path. They have long cycle lives and are available in a variety of sizes, materials, and configurations to meet the system requirements of high-purity and ultrahigh-purity (UHP) applications.
View Diaphragm ValvesSwagelok diaphragm-sealed valves come in various sizes, materials, and configurations to meet the needs of high-purity and UHP applications. They feature flow coefficients ranging from 0.20 to 13. Their fully swept flow paths and corrosion-resistant construction make them ideal for applications where cleanliness is crucial. Users can choose from manual, pneumatic, and locking actuator options.
Swagelok diaphragm-sealed valves can be used in atomic layer deposition (ALD), high-flow, modular gas system, thermal-immersion, and ultrahigh-purity applications requiring fluoropolymer component construction.
- Swagelok springless diaphragm valves for modular gas systems are easy to install, provide a visual indication of flow direction, and have a seat design that improves thermal stability
- Swagelok bulk gas diaphragm valves offer a combination of strength, flexibility, and cycle life to support a wide range of ultrahigh-purity shutoff, bulk-gas distribution, and isolation applications
- Swagelok thermal-immersion diaphragm valves can be entirely contained within a high-temperature, high-purity environment, making them strong options for ALD and precursor delivery applications
- Swagelok ultrahigh-purity fluoropolymer diaphragm valves offer a strong solution for UHP chemical distribution, DI water, and bulk chemical delivery systems
Have questions about diaphragm-sealed valves?
Diaphragm-Sealed Valves Categories
Bulk-Gas Diaphragm Valves, LD Series
High-flow application bulk-gas distribution diaphragm, designed to meet ultrahigh-purity shutoff, bulk-gas distribution, and isolation application needs.
High-Purity High-Pressure Diaphragm Valves, DL and DS Series
Discover high-purity, high-pressure diaphragm valves with repetitive shutoff with a fully contained softseat stem tip, standard bottom, and panel mounting.
Multi-Valve Manifolds
Find multi-valve manifolds with diaphragm-sealed valves. Designed for reliable performance, these manifolds offer high purity and precise fluid control.
Spare Parts and Accessories
Browse quality valve maintenance components for diaphragm-sealed valve spare parts and accessories, including diaphragm and seal kits, stem kits, and actuator kits.
Springless Diaphragm Valves for Modular Gas Systems, 1.125 in, DE Series
Reliable and enhanced control valves with a springless design are ideal for efficient operation in modular gas systems.
Thermal-Immersion Diaphragm Valves, DH Series
Thermal-immersion diaphragm valves are used in high-temperature processes such as atomic-layer deposition (ALD) and precursor delivery applications.
Ultrahigh-Purity Fluoropolymer Diaphragm Valves, DRP Series
Ensure optimal performance and longevity in UHP chemical systems with a fully swept flow path to minimize stress and fluid contamination.
Ultrahigh-Purity High-Flow Diaphragm Valves, DF Series
Increase cycle life with high-flow, springless diaphragm valves. No springs or threads improve cleanliness and fully swept flow path enhances purging.
Ultrahigh-Purity High-Pressure Diaphragm Valves, DPH Series
Ultrahigh-purity, high-pressure diaphragm valves are available in a variety of sizes, materials, and configurations for various applications.
Ultrahigh-Purity Shutoff Diaphragm Valves, DP Series
View ultrahigh-purity shutoff diaphragm valves with straight pattern and manual actuation, multiport and modular surface mount (MSM) with integrated actuators.
Diaphragm-Sealed Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Features: 1.125 in. C-seal and W-seal designs; Available in two- and three-port configurations; Compact pneumatic and manual actuators; Pneumatic actuator indicator ball: red for normally closed, green for normally open; Fixed orientation of actuator to body for consistency of installation; Corner chamfers on outlet side of body for visual indication of flow direction
Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance at 220 degrees C (428 degrees F) for high-temperature processes.
Features: Pneumatic and quarter-turn manual 2-way and 3-way models; pneumatic and manual models with adjustable flow and bypass features; DuPont® Teflon® modified PTFE wetted parts and polypropylene actuator; Meet SEMI Standard F57-0301 for ultrahigh-purity system components; Fine thread flare and Nippon Pillar® Super 300 end connections standard; space saver and other end connections available; Custom manifolds and subassemblies available
Features: Packless, all-metal containment; Working pressures from vacuum to 3500 psig (241 bar); Temperatures from –100 to 250°F (–73 to 121°C)
Features: Suitable for ultrahigh-purity applications; 316L VIM-VAR stainless steel body; Low-pressure and high-pressure models; VCR®, tube butt weld, and modular surface-mount end connections; Manual or pneumatic actuation
Features: Working pressures up to 300 psig (20.6 bar); Shutoff, bulk-gas distribution, and isolation service; Cast, forged, and bar stock stainless steel body material; 1/4 to 1 in. and 12 to 25 mm end connections
Features: 316L VAR stainless steel body; Working pressures up to 300 psig (20.6 bar); 1/4, 3/8, and 1/2 in.; 10 and 12 mm end connections
Calculate Flow Rate for the Right Valve Selection
Use our valve flow coefficient (Cv) calculator to chose a valve sized correctly for your needs.
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Vannes à membrane
La diversité des dimensions, des matériaux et des configurations de nos vannes à membrane permet de répondre aux besoins des applications haute et ultra-haute pureté, avec des coefficients de débit allant de 0,20 à 13 et des pressions de service pouvant atteindre 241 bar (3500 psig).
Les vannes à membrane obtureront efficacement l’écoulement dans votre système et peuvent supporter un grand nombre de cycles. La gamme des vannes à membrane Swagelok se compose des produits suivants : vannes pour dépôt par couche atomique (ALD), vannes sans ressort pour les systèmes à gaz modulaires, haute performance et à débit élevé, vannes pour immersion à haute température et vannes en fluoropolymère ultra-haute pureté. Des actionneurs manuels, pneumatiques et de verrouillage sont disponibles.