Swagelok^® Ultrahigh-Purity Fluoropolymer Diaphragm Valves (DRP Series)

Swagelok DRP series ultrahigh-purity (UHP) fluoropolymer diaphragm valves offer a strong solution for UHP chemical distribution, deionized (DI) water, and bulk chemical delivery systems.

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Swagelok^® DRP series valves are designed with modified PTFE wetted parts for superior chemical resistance. A patented fluid flow path reduces fluid entrapment, allowing for quick purging of process fluids and minimizing the risk of contamination. The design also limits fluid shear, preventing slurry agglomeration and improving process efficiency.

The modified PTFE diaphragm is optimized for durability and long cycle life, with a patented shape that reduces stress during operation. A reinforced diaphragm rim seals the valve cavity, preventing process fluid contamination and reducing seat strain.

DRP series diaphragm valves are available with either pneumatic or manual actuation and adjustable flow and bypass options for precise control. They meet SEMI Standard F57-0301, making them perfect for ultrahigh-purity (UHP) applications like chemical mechanical planarization (CMP) slurry systems, DI water systems, and bulk chemical delivery systems.

Specifications

Pressure Rating	Up to 100 psig (6.8 bar)
Media Temperature	73° to 212°F (23° to 100°C)
Flow Coefficient	Up to 10.2
Body, Diaphragm Material	Modified PTFE
End Connections	Type: Fine thread flare and Nippon Pillar Super 300^® standard Size: 1/4 to 1 1/4 in. and 6 to 25 mm Configuration: two- and three-way manual and pneumatic shutoff; adjustable flow and bypass models

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Catalogues des vannes à membrane en fluoropolymère très haute pureté

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Ultrahigh-Purity Fluoropolymer Diaphragm Valves, DRP Series

Features: Pneumatic and quarter-turn manual 2-way and 3-way models; pneumatic and manual models with adjustable flow and bypass features; DuPont® Teflon® modified PTFE wetted parts and polypropylene actuator; Meet SEMI Standard F57-0301 for ultrahigh-purity system components; Fine thread flare and Nippon Pillar® Super 300 end connections standard; space saver and other end connections available; Custom manifolds and subassemblies available

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