Swagelok® Ultrahigh-Purity Fluoropolymer Diaphragm Valves (DRP Series)
Swagelok DRP series ultrahigh-purity (UHP) fluoropolymer diaphragm valves offer a strong solution for UHP chemical distribution, deionized (DI) water, and bulk chemical delivery systems.
Request Additional DetailsSwagelok® DRP series valves are designed with modified PTFE wetted parts for superior chemical resistance. A patented fluid flow path reduces fluid entrapment, allowing for quick purging of process fluids and minimizing the risk of contamination. The design also limits fluid shear, preventing slurry agglomeration and improving process efficiency.
The modified PTFE diaphragm is optimized for durability and long cycle life, with a patented shape that reduces stress during operation. A reinforced diaphragm rim seals the valve cavity, preventing process fluid contamination and reducing seat strain.
DRP series diaphragm valves are available with either pneumatic or manual actuation and adjustable flow and bypass options for precise control. They meet SEMI Standard F57-0301, making them perfect for ultrahigh-purity (UHP) applications like chemical mechanical planarization (CMP) slurry systems, DI water systems, and bulk chemical delivery systems.
Specifications
| Pressure Rating | Up to 100 psig (6.8 bar) |
| Media Temperature | 73° to 212°F (23° to 100°C) |
| Flow Coefficient | Up to 10.2 |
| Body, Diaphragm Material | Modified PTFE |
| End Connections | Type: Fine thread flare and Nippon Pillar Super 300® standard Size: 1/4 to 1 1/4 in. and 6 to 25 mm Configuration: two- and three-way manual and pneumatic shutoff; adjustable flow and bypass models |
Want to optimize your ultrahigh-purity fluid system with the DRP series valve?
UHP Fluoropolymer Diaphragm Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Features: Pneumatic and quarter-turn manual 2-way and 3-way models; pneumatic and manual models with adjustable flow and bypass features; DuPont® Teflon® modified PTFE wetted parts and polypropylene actuator; Meet SEMI Standard F57-0301 for ultrahigh-purity system components; Fine thread flare and Nippon Pillar® Super 300 end connections standard; space saver and other end connections available; Custom manifolds and subassemblies available
Calculate Flow Rate for the Right Valve Selection
Use our valve flow coefficient (Cv) calculator to chose a valve sized correctly for your needs.
Use the ToolSwagelok Resources Curated for You
How to Select the Right Valves for Your Industrial Fluid System
Learn how to apply the practical STAMPED method to select the valves most suited to your industrial fluid or sampling system design applications.
Minimize the Costs of Fugitive Emissions with Low-E Valves
Fugitive emissions are a growing concern in the chemical and petroleum refining industry. Certified low-emissions (Low-E) valves can protect your facility and bottom line. Learn what they are, how they are tested, and how they can help you in this post.
Cómo Aislar Sistemas de Fluidos Industriales con Válvulas de Cierre
El aislamiento de las líneas de los sistemas de fluidos industriales antes del mantenimiento es vital para la seguridad de planta. Una de las formas más seguras de aislar una línea de un sistema de fluidos es instalar dos válvulas de cierre. Aprenda cómo diseñar configuraciones adecuadas a su sistema.
Una Nueva Válvula. Tres Razones por las que Podría Cambiar la Fabricación del Semiconductor
Descubra cómo la última innovación en la tecnología de válvulas de deposición de capas atómicas (ALD), está cambiando las cosas para los fabricantes de semiconductores de alta tecnología.