Swagelok^® 초고순도 플루오르수지 다이어프램 밸브(DRP 시리즈)

Swagelok DRP 시리즈 초고순도 플루오르수지 다이어프램 밸브는 UHP 케미컬 분배, 탈이온수(DI), 벌크 화학물질 공급 시스템에 강력한 솔루션을 제공합니다.

Swagelok^® DRP series valves are designed with modified PTFE wetted parts for superior chemical resistance. A patented fluid flow path reduces fluid entrapment, allowing for quick purging of process fluids and minimizing the risk of contamination. The design also limits fluid shear, preventing slurry agglomeration and improving process efficiency.

The modified PTFE diaphragm is optimized for durability and long cycle life, with a patented shape that reduces stress during operation. A reinforced diaphragm rim seals the valve cavity, preventing process fluid contamination and reducing seat strain.

DRP series diaphragm valves are available with either pneumatic or manual actuation and adjustable flow and bypass options for precise control. They meet SEMI Standard F57-0301, making them perfect for ultrahigh-purity (UHP) applications like chemical mechanical planarization (CMP) slurry systems, DI water systems, and bulk chemical delivery systems.

Specifications

Pressure Rating	Up to 100 psig (6.8 bar)
Media Temperature	73° to 212°F (23° to 100°C)
Flow Coefficient	Up to 10.2
Body, Diaphragm Material	Modified PTFE
End Connections	Type: Fine thread flare and Nippon Pillar Super 300^® standard Size: 1/4 to 1 1/4 in. and 6 to 25 mm Configuration: two- and three-way manual and pneumatic shutoff; adjustable flow and bypass models

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