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原子层沉积 (ALD) 阀

Swagelok® Atomic Layer Deposition (ALD) Valves

Swagelok ultrahigh-purity atomic layer deposition (ALD) valves offer the ultrahigh cycle life, high-speed actuation, flow rates, thermal immersibility, and extreme cleanliness needed to enable precise dosing in advanced semiconductor manufacturing applications.

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Our high-performance ALD valves are a key example of how Swagelok has long displayed responsive technical leadership in the semiconductor manufacturing industry. Since introducing the world to ALD valve technology, Swagelok has worked closely with semiconductor industry customers to understand their needs, then create ALD valves that provide the extreme levels of precision, consistency, cleanliness, and high cycle life necessary to keep up with the quick pace of innovation in the marketplace. Our ALD ultrahigh-purity valves feature:

  • Ultrahigh cycle life with high-speed actuation
  • Flow coefficients ranging from 0.27 to 1.7
  • Full immersibility up to 392°F (200°C) with thermal actuators
  • Suitability for ultrahigh-purity applications with standard 316L VIM-VAR stainless steel valve bodies
  • Modular surface-mount, tube butt weld, and Swagelok VCR® end connections
  • Electronic or optical actuator position-sensing option

Atomic Layer Deposition (ALD) Valves Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

应用于半导体行业的世伟洛克 ALD20 UHP 阀的无尘室组件。

One New Valve: Three Reasons It Could Change Semiconductor Manufacturing

Find out how the latest innovation in atomic layer deposition (ALD) valve technology is changing the game for high-tech semiconductor manufacturers.

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Swagelok Resources Curated for You

Improve Semiconductor Yield with Optimized Alloys

Discover how semiconductor fabricators can improve end-to-end production yields and improve long-term profitability by selecting the right metals for critical fluid system components.

卡尔怀特曾经在半导体行业供应链的各个环节工作了近 40 年,他提出了有关半导体行业发展的过去、现在和未来的切身见解。
Q&A: Semiconductor Manufacturing Past, Present, and Future

Find out how collaboration between semiconductor tool OEMs, microchip manufacturers, and fluid system solutions providers has enabled the semiconductor market to keep up with the demands of Moore’s Law for decades, and where we go from here.

Rosendahl Nextrom与世伟洛克合作,大大提高了运营效率
Fiber Optics Equipment Manufacturer Increases Efficiency with Customized Solutions

Since the 1980s, Rosendahl Nextrom has depended on Swagelok to move its business forward. Learn more about the solutions that allowed the company to outpace its competitors and remain an industry leader.

稀释制冷机制造商 Bluefors 信赖世伟洛克提供的流体系统组件和解决方案。
Reliable Fluid System Solutions for the Scientific Frontier

Learn why Finnish dilution refrigerator manufacturer Bluefors trusts Swagelok for fluid system components and solutions that help enable quantum computing, experimental physics, and more.

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