
Swagelok® Thermal-Immersion Diaphragm Valves (DH Series)
Swagelok DH series thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance in high-temperature processes.
Request More InformationSwagelok® DH series thermal-immersion diaphragm valves are designed for applications where the valve needs to be entirely contained within a high-temperature, high-purity environment such as atomic layer deposition (ALD) and precursor delivery applications. These valves have a fully contained high-purity PFA seat that provides compatibility with a broad range of chemicals and excellent resistance to swelling and contamination. The fully swept flow path in the body minimizes entrapment areas and maximizes flow capacity.
Flow coefficients up to 0.60, a variety of 1/4 and 3/8 in. end connections, and pneumatically and manually actuated models are available to meet a wide range of system needs. The “normally closed” is actuator capable of a valve opening or closing time of less than 5 ms, and the valve is designed for optimal performance at 220°C (428°F).
Want to know more about DH series thermal-immersion valves?
Thermal-Immersion Diaphragm Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance at 220 degrees C (428 degrees F) for high-temperature processes.

Calculate Flow Rate for the Right Valve Selection
Use our valve flow coefficient (Cv) calculator to chose a valve sized correctly for your needs.
Use the ToolSwagelok Resources Curated for You

How to Select the Right Valves for Your Industrial Fluid System
Learn how to apply the practical STAMPED method to select the valves most suited to your industrial fluid or sampling system design applications.

Q&A: Semiconductor Manufacturing Past, Present, and Future
Find out how collaboration between semiconductor tool OEMs, microchip manufacturers, and fluid system solutions providers has enabled the semiconductor market to keep up with the demands of Moore’s Law for decades, and where we go from here.

Améliorer les rendements de fabrication des semi-conducteurs avec des alliages optimisés
Découvrez comment les fabricants de semi-conducteurs peuvent améliorer leurs rendements de fabrication d’un bout à l’autre de la chaîne et accroître leur rentabilité à long terme en choisissant les bons métaux pour les composants de leurs systèmes fluides critiques.

Une nouvelle vanne. Trois raisons pour lesquelles elle pourrait révolutionner le secteur des semi-conducteurs
Découvrez comment la dernière innovation dans le domaine des vannes pour dépôt par couche atomique (ALD) est en train de changer la donne pour les fabricants de semi-conducteurs haute technologie.