Swagelok® Atomic Layer Deposition (ALD) Valves
Swagelok ultrahigh-purity atomic layer deposition (ALD) valves offer the ultrahigh cycle life, high-speed actuation, flow rates, thermal immersibility, and extreme cleanliness needed to enable precise dosing and maximize chip yield in advanced semiconductor manufacturing applications.
Request ALD Valve InformationSince introducing the world to ALD valves, we have worked closely with semiconductor tool OEMs and fabs to deliver advanced ALD valve technology that provides the extreme levels of precision, consistency, cleanliness, and high cycle life necessary to keep up with the quick pace of innovation in the marketplace. Swagelok® ALD valves can support increased chip production efficiency and overcome the challenges that are often associated with ALD processes.
Our ALD ultrahigh-purity valves feature:
- Ultrahigh cycle life with high-speed actuation
- Cv ranging from 0.27 to 1.7
- Temperature capability up to 392°F (200°C) for specified models
- Electronic or optical actuator position-sensing option
- Cleanliness suitability for ultrahigh-purity applications
- Modular surface mount, tube butt weld, and VCR® end connections
Категории клапанов для атомно-слоевого осаждения (ALD)
Válvulas de Diafragma de Ultra Alta Pureza, Serie ALD7
La válvula de diafragma Swagelok® ALD7 de ultra alta pureza ofrece la precisión y consistencia necesarias para maximizar la producción de chips en las aplicaciones de fabricación de semiconductores.
Клапаны сверхвысокой степени чистоты для систем с высоким расходом, серия ALD20
Tecnología avanzada de deposición de capas atómicas con caudales 2-3 veces superiores a los de otras válvulas ALD gracias a la válvula ALD20 de ultra alta pureza.
Мембранные клапаны сверхвысокой степени чистоты, серии ALD3 и ALD6
Мембранные клапаны ALD3 и ALD6 обеспечивают сверхвысокий циклический срок службы, высокую скорость срабатывания и эффективную работу в системах атомно-слоевого осаждения.Atomic Layer Deposition (ALD) Valve Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
원자층 증착 (ALD) 용 다이어프램 밸브 고속 개폐 시에도 매우 긴 수명 유지 ; Cv 범위 0.27 ~ 0.62; 고온용 개폐기로 200°C (392°F)까지 사용가능; 전자 개폐기 위치 감지 옵션; 초고순도 사양에 적합한 316L VIM-VAR 스텐레스강 몸체; VCR®, 튜브 맞대기 용접 및 블럭 조립식 연결구
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Find out how the latest innovation in atomic layer deposition (ALD) valve technology is changing the game for high-tech semiconductor manufacturers.
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最先端科学で信頼できる流体システム・ソリューション
フィンランドの希釈冷凍機メーカーであるブルーフォース社が、量子コンピューターや実験物理学などに欠かせない流体システム部品やソリューションに関して、スウェージロックに信頼を寄せている理由を紹介します。