Swagelok® 압력 게이지, 초고순도 및 클린 드라이 에어(PGU 및 PGC 시리즈)
Swagelok® 초고순도 및 클린 드라이 에어 압력 게이지는 부르동(Bourdon) 튜브를 사용하여 양압 시스템 압력과 진공을 신뢰성 높게 모니터링합니다.
압력 게이지 정보 요청Swagelok® PGU series ultrahigh-purity pressure gauges and Swagelok® PGC series clean dry air pressure gauges are designed for use in a wide range of applications, from bulk gas distribution to process tool applications. Their accuracy is in accordance with ASME B40.1, EN837-1, and JIS B7505.
PGU series gauges are ultrahigh-purity (UHP) “clean” for semiconductor gas applications in accordance with SEMI/SEMATECH, are cleaned and packaged in a class 100/10 cleanroom, and have 316L VAR end connections. PGC series gauges are assembled, cleaned, and packaged in a class 100 cleanroom and have 1/4 in. NPT end connections. Both series are purged with nitrogen and include protective cap over threaded connection. Every ultrahigh-purity and clean dry air gauge is 100% factory calibrated and helium leak tested to a maximum rate of 1× 10-9 std cm3/s.
Specifications
| Dial Ranges | PGU series: Vacuum to 3000 psi; 200 bar; 21 MPa PGC series: Vacuum to 6000 psi; 400 bar; 40 MPa |
| Dial Sizes | 28, 40, and 50 mm (1, 1 1/2, and 2 in.) |
| Accuracy |
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| Temperature Range | Ambient: –40 to 140°F (–40 to 60°C) Media: –40 to 212°F (–40 to 100°C) |
| End Connections | PGU series: 1/4 in. female VCR® fitting, 1/4 in. rotatable male VCR fitting, 1/4 in. integral male VCR fitting, 1 1/2 in. flow-through surface-mount PGC series: 1/4 in. male NPT fitting |
Pressure Gauges Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
■ 目盛板の外径サイズ： 40 mm、50 mm／■ ASME B40.100に準拠した精度／■ エンド・コネクションの材質：316L VAR ステンレス鋼（PGUシリーズ）／■ 形状：背面取り付け用（センター接続）、下部取り付け用
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