Swagelok® Thermal-Immersion Diaphragm Valves (DH Series)
Swagelok DH series thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance in high-temperature processes.
Request More InformationSwagelok® DH series thermal-immersion diaphragm valves are designed for applications where the valve needs to be entirely contained within a high-temperature, high-purity environment such as atomic layer deposition (ALD) and precursor delivery applications. These valves have a fully contained high-purity PFA seat that provides compatibility with a broad range of chemicals and excellent resistance to swelling and contamination. The fully swept flow path in the body minimizes entrapment areas and maximizes flow capacity.
Flow coefficients up to 0.60, a variety of 1/4 and 3/8 in. end connections, and pneumatically and manually actuated models are available to meet a wide range of system needs. The “normally closed” is actuator capable of a valve opening or closing time of less than 5 ms, and the valve is designed for optimal performance at 220°C (428°F).
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Thermal-Immersion Diaphragm Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
Swagelok thermal-immersion diaphragm valves offer high-speed actuation and are designed for optimum performance at 220 degrees C (428 degrees F) for high-temperature processes.
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최적의 합금으로 반도체 수율 향상
반도체 제조업체가 어떻게 하면 핵심 유체 시스템 부품에 적절한 합금을 선택하여 종합적인 생산 수율과 장기 수익성을 높일 수 있는지 알아보십시오.
하나의 새로운 밸브, 반도체 제조 기술을 바꿀 수 있는 세 가지 이유
혁신적인 최신 원자층 증착(ALD, Atomic Layer Deposition) 밸브 기술이 어떻게 첨단 기술 반도체 제조 시장을 변화시킬 수 있는지 소개합니다.