Swagelok® Ultrahigh-Purity Fluoropolymer Diaphragm Valves (DRP Series)
Swagelok DRP series ultrahigh-purity (UHP) fluoropolymer diaphragm valves offer a strong solution for UHP chemical distribution, deionized (DI) water, and bulk chemical delivery systems.
Request Additional DetailsSwagelok® DRP series valves are designed with modified PTFE wetted parts for superior chemical resistance. A patented fluid flow path reduces fluid entrapment, allowing for quick purging of process fluids and minimizing the risk of contamination. The design also limits fluid shear, preventing slurry agglomeration and improving process efficiency.
The modified PTFE diaphragm is optimized for durability and long cycle life, with a patented shape that reduces stress during operation. A reinforced diaphragm rim seals the valve cavity, preventing process fluid contamination and reducing seat strain.
DRP series diaphragm valves are available with either pneumatic or manual actuation and adjustable flow and bypass options for precise control. They meet SEMI Standard F57-0301, making them perfect for ultrahigh-purity (UHP) applications like chemical mechanical planarization (CMP) slurry systems, DI water systems, and bulk chemical delivery systems.
Specifications
| Pressure Rating | Up to 100 psig (6.8 bar) |
| Media Temperature | 73° to 212°F (23° to 100°C) |
| Flow Coefficient | Up to 10.2 |
| Body, Diaphragm Material | Modified PTFE |
| End Connections | Type: Fine thread flare and Nippon Pillar Super 300® standard Size: 1/4 to 1 1/4 in. and 6 to 25 mm Configuration: two- and three-way manual and pneumatic shutoff; adjustable flow and bypass models |
Want to optimize your ultrahigh-purity fluid system with the DRP series valve?
UHP Fluoropolymer Diaphragm Valves Catalogs
Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.
DRP 시리즈 공기작동식 및 1/4 회전 수동식 2-방향 및 3-방향 모델; 공기 작동식 및 유량 조절과 바이패스가 가능한 수동식 모델 유체가 접촉되는 부위는 DuPont® Teflon® 개선된 PTFE 및 폴리프로필렌 개폐기 초고순도 시스템 부품에 적용되는 SEMI 표준 F57-0301 준수 확관형 및 Nippon Pillar® Super 300 연결구가 기본형; Flowell, space saver 및 기타 연결구 제공 가능 주문자 요청에 의한 매니폴드 및 부분 조립품 제공 가능
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