text.skipToContent text.skipToNavigation
초고순도 다이어프램 밸브, ALD7 시리즈

Swagelok® Ultrahigh-Purity Diaphragm Valves (ALD7 Series)

The Swagelok ALD7 ultrahigh-purity valve provides the flow consistency and capacity, actuator speed, temperature rating, and cleanliness necessary to help maximize chip throughput in new or existing semiconductor manufacturing tools.

Request More Information

Performance So Consistent, It’s Revolutionary

The Swagelok ALD7 ultrahigh-purity diaphragm valve is the latest innovation in atomic layer deposition (ALD) valve technology resulting from more than five decades of Swagelok supporting semiconductor fabricators and tool manufacturers. This high-performance semiconductor valve enables tool manufacturers and chip fabricators to increase viable chip yields and enhance profitability by enabling the flow consistency, flow capacity, actuator speed, and performance at high temperatures necessary to overcome limitations in current production processes.

Built for Uncompromising Precision

Featuring faster response time, thermal stability at high temperatures, and enhanced corrosion resistance, the ALD7 provides consistent performance from valve to valve, dose to dose, and chamber to chamber over an ultrahigh cycle life.

  • The ALD7 delivers precise dosing over the course of millions of cycles in even the most demanding ALD applications
  • Enhanced actuator technology allows this semiconductor valve to operate faster than industry-standard technology, with a response time as low as 5 ms
  • The actuator is immersible to 150°C, and the valve is rated to 200°C, providing flow consistency at high temperatures and under vacuum conditions
  • A valve body comprised of proprietary ultrahigh-purity Swagelok 316L VIM-VAR stainless steel provides the ALD7 with resistance to corrosive gases

Higher Performance. Minimal Rework Required.

The ALD7 can deliver flow capacity compared to existing semiconductor valves but maintains the same footprint. Its compact design helps semiconductor manufacturers upgrade the productivity of legacy tools without making significant process modifications.

  • The ALD7 can deliver a flow coefficient (Cv) up to 0.7 and enables precise, repeatable dosing from chamber to chamber
  • The ALD7 maintains the same 1.5-in. footprint as Swagelok industry-standard ALD valves
  • The valve features an integrated thermal isolator, shortening the valve’s profile and allowing system designers to maximize limited space near the reaction chamber


Working PressureVacuum to 145 psig (10.0 bar)
Burst Pressure>3200 psig (220 bar)
Actuation Pressure60 to 120 psig (4.1 to 8.27 bar)
Temperature RatingValve body from 32°F (0°C) to 392°F (200°C)
Actuator from 32°F (0°C) to 302°F (150°C)
Flow Coefficient 0.7 Cv
Body Materials316L VIM-VAR stainless steel
Diaphragm MaterialCobalt-based superalloy
End Connections
TypeVCR® fittings
Tube butt weld
1.5 in. modular surface-mount high flow C-seal

ALD7 Series Valves Catalogs

Locate detailed product information, including materials of construction, pressure and temperature ratings, options, and accessories.

ALD 밸브 및 매니폴드

How to Solve Top ALD and ALE Semiconductor Processing Challenges

ALD and ALE semiconductor production processes come with some inherent challenges and complexities. Learn how the right selection of process valves can help you overcome them.

Select the Right Valves for ALD Challenges

Swagelok Resources Curated for You

스웨즈락 유체 시스템 부품은 반도체 제조 환경에서 높은 내구성을 발휘하도록 설계된 재질로 제조됩니다.
Improve Semiconductor Yield with Optimized Alloys

Discover how semiconductor fabricators can improve end-to-end production yields and improve long-term profitability by selecting the right metals for critical fluid system components.

Carl White는 반도체 산업 공급망 내 다양한 분야에서 40년 가까이 종사했으며, 반도체 산업 발전의 과거와 현재, 미래에 대해 자신의 경험을 바탕으로 한 전망을 제시합니다.
Q&A: Semiconductor Manufacturing Past, Present, and Future

Find out how collaboration between semiconductor tool OEMs, microchip manufacturers, and fluid system solutions providers has enabled the semiconductor market to keep up with the demands of Moore’s Law for decades, and where we go from here.

로젠달 넥스트롬(Rosendahl Nextrom), 스웨즈락과 협력을 통해 운영 효율성 극대화
Fiber Optics Equipment Manufacturer Increases Efficiency with Customized Solutions

Since the 1980s, Rosendahl Nextrom has depended on Swagelok to move its business forward. Learn more about the solutions that allowed the company to outpace its competitors and remain an industry leader.

희석 냉동기 제조업체인 블루포스(Bluefors)는 스웨즈락의 유체 시스템 부품과 솔루션을 신뢰합니다.
Reliable Fluid System Solutions for the Scientific Frontier

Learn why Finnish dilution refrigerator manufacturer Bluefors trusts Swagelok for fluid system components and solutions that help enable quantum computing, experimental physics, and more.

This process may take several minutes. Please be patient and remain on the page.